Abstract
To meet the requirements for lightweight, miniaturized dispersive optical systems for space applications, linear variable filters with a high transmittance and spatial dispersion coefficient are proposed. The filters were produced with dual ion beam sputtering, where a single layer thickness variation was achieved with a deposition rate adjustment based on a linear variable correction formula. A linear variable trend matching method was used to correct the film thickness based on the reduction of the mismatch error between two materials: Ta2O5 and SiO2. The influence of the spectral and spatial measuring average effects was addressed by sampling the spot size optimization. This paper presents an all-dielectric linear variable filter that operates between 520 and 1000 nm, with an excellent linear dependence of 40 nm/mm over 12 mm. The linear variable filter possessed a 2.5% bandwidth, and its transmittance was found to be >80% at the central wavelength of the band, with a 0.1% transmittance in the cut-off region. These results indicate great potential for optical devices for space applications, and the developed process has good reproducibility and stability.
Highlights
As aerospace technology rapidly develops, increasing attention has been paid to optical experimental and detection equipment for space applications
Based on the principle that the thickness of the film prepared at beam during sputtering deposition under a uniform rotation of the fixture, this paper established the various points on the surface of the substrate is proportional to the angle exposed to the film material linear variable correction formula (Equation (2)), combined it with the density distribution of the beamsputtering during sputtering deposition under a uniform of the fixture, this paper established film material in the vacuum chamber of therotation coating machine and designed the shape of the linear variable correction formula (Equation (2)), combined it with the density distribution of the the masks
In the thickness correction process of the different film materials, the mismatch error of the two film materials was correction process of the different film materials, the mismatch error of the two film materials was reduced through the linear variable trend matching method
Summary
As aerospace technology rapidly develops, increasing attention has been paid to optical experimental and detection equipment for space applications. Compared with traditional dispersion devices, such as prisms and gratings, they have a compact structure, and their bandpass transmission and bandwidth can be adjusted to the required operational wavelength [3,4]. The efficiency of LVF beam splitting is higher than that of traditional dispersion devices, which is of great significance for the miniaturization and integration of optical systems in space applications [11,12]. In our research, considering the requirements of dispersive optical systems in space and the size of the sensor, the size of the required LVF is 12 mm, the operating spectrum is between 520 and 1000 nm, and the transmittance should be >80% at the central wavelength of the band. The mismatch error of two materials is reduced using a linear variable trend matching method, which has not been reported before
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