Abstract
The application of high purity phosphoric acid in industrial production is more and more widely used, especially electronic grade phosphoric acid, and the demand of it has risen year by year. This paper introduces the preparation and research advance of electronic grade phosphoric acid, expounds the principle, advantages and disadvantages and research advance of preparing high purity phosphoric acid by high purity phosphorus oxidation method and phosphoric acid purification method. Using hot process by direct method to prepare high purity electronic grade phosphoric acid is still the mainstream on the current, and the key of technique is the purification of yellow phosphorus and phosphoric acid.
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