Abstract
In this study, we carried out an electron beam (EB) melting purification process to obtain a 5N-grade high-purity Ru ingot from commercial Ru powder. The first step was to primarily sinter Ru powder compact by means of vacuum heat treatment at 1,773K. Vacuum sintering was employed to ensure a high vacuum condition during EB melting by the removal of remaining gaseous elements between the compact powders. The second step was to obtain Ru ingots by EB melting of the sintered Ru compact. The purity of the Ru raw powder was 99.962mass% and the purity of a premelted Ru button ingot obtained by EB melting was 99.9873mass%. The purities of the respective Ru button ingots remelted for 2 and 4min were 99.9988 and 99.9992mass%, respectively. As a result, the sum of metallic impurities in the Ru ingot refined for 6min was 5.3massppm and the purity of the ingot considerably increased up to 99.9995mass%, which means that a 5N-grade high-purity Ru ingot can be obtained by the EB melting purification process. Furthermore, the EB-melted Ru ingot showed an excellent ability to remove interstitial impurities. [doi:10.2320/matertrans.M2012155]
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