Abstract
Lead lanthanum zirconate titanate (PLZT) film with an array of air-holes was successfully fabricated on a platinum-deposited (0 0 1) magnesium oxide substrate using a sol–gel method with a resist mold. A PLZT precursor solution was cast into a mold with resist pillars patterned using electron-beam lithography. After removing the resist pillars and applying a firing process, a PLZT ceramic film with air-holes was obtained. The patterned PLZT film was grown epitaxially on the substrate. Reflection peaks were also observed by optical measurement of PLZT film with a hexagonal array of air-holes. The frequency range of the reflection peaks coincided with that of the calculated photonic band structures. We consider that this periodic structure and process are suitable for preparing tunable photonic crystals.
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