Abstract
Transparent and conductive tin-doped indium oxide thin films were prepared on sodalime and quartz glass substrates by thermal decomposition of organometallic compounds. The optical transmittance of the films was 90 % in the visible region. The electrical resitivity changed from 6 – 8 × 10 −3 Ω cm to 3 – 4 × 10 −2 Ω cm depending on composition and after annealing in vacuum, it decreased by a factor of 2–10.
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