Abstract
The ability to produce polymer-metal thin films by co-sputtering from a composite target was investigated using polytetrafluoroethylene (PTFE) (Teflon) and Ekonol polymers. The preparation of PTFE-metal thin films by sputtering was found to be limited by target cross-contamination possibly caused by negative ion re-sputtering processes. The Ekonol-metal films were found to have microstructure and conductivity properties similar to other metal-insulator composites.
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