Abstract
To improve the photoconductivity of amorphous carbon nitride films a-CNx, hydrogenation was tried. Hydrogenation was not observed in a-CNx film but the improvement of the electronic properties was observed in a few layers of the films. Therefore, to get a better photoconductive a-CNx, the layer-by-layer method was tried with success. Photoconductivity to dark conductivity ratios of a-CNx films, obtained by this layer-by-layer method, were 5×106 on excitation with white light of 100 mW cm−2.
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