Abstract
The properties of films of rare earth metal oxides obtained by evaporation of the metal in an oxygen atmosphere are given. The deposits were highly dispersed and crystallized with a cubic type-Mn2O3 structure. The data obtained include: width of the forbidden band (4–6 eV), refractive index (1.89–2.05), specific electrical resistance (1014–1015 ω·cm), breakdown voltage (106–107 V/cm), etc. It is shown that films of REM oxides are promising as passive elements of microcircuits, transparent coatings, temperature and heat-flow sensors. These examples by far do not exhaust the possibilities for use of such films.
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