Abstract
We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.
Highlights
We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N2 atmosphere
The surface roughness of the thin film electrolyte directly affects the ionic conductivity of the electrolyte
We found that an optimal lithium content exists and the highest ionic conductivity was achieved for a lithium content of 150%
Summary
The reagents Li2CO3, La2O3 and TiO2 were mixed in different molar ratios (1.2:1:4, 1.5:1:4, 1.8:1:4, 2:1:4) and they were melted at 700°C for 4 h in an electrical furnace. The mixtures were calcined at 1050, 1100 and 1200°C, respectively, all for 12 h [17]. The obtained ceramic was ball-milled to obtain a fine powder. The ultima powder compound was pressed into a 60 mm diameter thin slice. The slice was sintered at 1100°C for 5 h. The composition of the LLTO target was Li0.6La0.5TiO3, Li0.75La0.5TiO3, Li0.9La0.5TiO3, LiLa0.5TiO3, respectively
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