Abstract
A series of FeCo-based thin films were prepared by magnetron sputtering without applying an induced magnetic field. The microstructure, electrical properties, magnetic properties and thermal stability of FeCo, FeCoSiN monolayer thin film and [FeCoSiN/SiN x ] n multilayer thin film were investigated systematically. When FeCo thin film was doped with Si and N, the resistivity and soft magnetic properties of the obtained FeCoSiN thin film can be improved effectively. The coercivity (H c), resistivity (ρ) and ferromagnetic resonance frequency (f r) can be further optimized for the [FeCoSiN/SiN x ] n multilayer thin film. When the thickness of FeCoSiN layer and SiN x layer is maintained at 7 and 2 nm, the H c, ρ and f r for [FeCoSiN/SiN x ] n multilayer thin film are 225 A·m−1 392 µΩ·cm−1 and 4.29 GHz, respectively. In addition, the low coercivity of easy axis (H ce ≈ 506 A·m−1) of [FeCoSiN/SiN x ] n multilayer thin film can be maintained after annealing at 300 °C in air for 2 h.
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