Abstract
The films of (1-x)Pb(Sc 1/2 Nb 1/2 )O 3 -xPbTiO 3 (x=0.6, PSNT(40/60)) were successfully deposited on Pt/Ti/SiO 2 /Si substrates via spin coating method. Using combination of homogeneous precursor solutions and two-step heat treatment, it was possible to obtain the PSNT(40/60) thin films of perfect perovskite phase with virtually no pyrochlore phase after annealing just above 550°C. The root-mean-square surface roughness of a 240-nm-thick film was 3 nm as measured by atomic force microscope (AFM). The PSNT(40/60) films annealed at 650°C showed a well-saturated hysteresis loop at an applied voltage of 7 V with remnant polarization (P r ) and coercieve voltage (V c ) of 14 μC/cm 2 and 1.5 V. The leakage current density was lower than 10 -6 A/cm 2 at an applied voltage of 7 V.
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