Abstract
The nanostructured zirconium (Zr) films deposited on Al2O3 substrate are obtained by pulsed laser deposition (PLD) for the application of first mirror. Structural features, optical properties and surface morphologies of as-grown Zr films are systematically investigated as a function of pulse repetition rate. It is found that the Zr films show a typical hexagonal close packed structure and all deposited films exhibit a very smooth surface. There are no voids and folds on the surface of Zr films. The root mean square roughness (RMS) values increase with increasing pulse repetition rate. The variation of pulse repetition rate has no obvious effects on the reflectivity because of the smooth film surface. Up to the wavelength of 800nm, the reflectivity is higher than 70%, which is excellent for the application of first mirror.
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