Abstract
For thin film metalorganic chemical vapor deposition (MOCVD), a stoichiometric gas phase can be obtained from a mixture of the precursors in the desired mole ratios, in spite of differences in the volatilities of the individual compounds. Proper film composition is obtained by controlling the velocity of a carriage containing the precursors through the heating zone of a vaporizer. YBaCuO (YBCO) superconducting films were prepared on yttrium stabilized zirconia (YSZ) (001) crystal substrates by single source MOCVD using a mixture of powders of Y(thd)/sub 3/, Ba(thd)/sub 2/ and Cu(thd)/sub 2/ as sources. Nondestructive measurements of resistivity, critical current, composition, and surface morphology were performed on these films. A single crystal film with T/sub co/=89 K was made under optimum conditions. Its homogeneity was investigated by resistivity and T/sub co/ measurements and by atomic force microscopy (AFM) at several points of the surface along a diameter of this film. The roughness of the film is higher at the edge than at the center, and this appears to be correlated with the normal state resistivity. The c-axis and a-axis YBCO phases compete with each other at substrate temperatures ranging from 750 to 820/spl deg/C. The c-axis YBCO phase shows spiral growth structure and the spiral step height is about 12.
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