Abstract
Abstract Y2O3 thin film waveguides were prepared using a sol–gel method and a dip-coating procedure. Multicoating operations were necessary to produce multimode and low attenuation coefficient waveguides. Thickness and refractive index were determined by m-lines spectroscopy. X-ray diffraction (XRD) and conventional transmission electron microscopy (CTEM) were used for structural investigations and nanocrystals size determination as a function of the annealing temperature. The Y2O3 amorphous phase was observed at low heat-treatment temperature (300°C) and the layers turn to cubic nanocrystalline form when the annealing temperature reached 400°C. An annealing treatment at 600°C was necessary to provide more densified and good optical planar waveguides exhibiting an attenuation coefficient lower than 2 dB/cm.
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