Abstract
As alternative to TiN based material, nc-(Ti1-xAlx)N and h-AlN were deposited on steel substrate using plasma CVD technique and characterized by means of XRD, XPS, EDX. The effect of Al substitution can be shown by the decrease of the lattice parameters of TiN as the fraction of Al increases. As the fraction of Al further increases up to 0.8, the hexagonal AlN phase precipitates. The hardness of these coating are around 30 GPa higher than that prepared by other method.
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