Abstract
ABSTRACTPt/TiO2 nanocomposite films were deposited on quartz glass and ITO glass substrates by the co-sputtering method. As-deposited composite films were amorphous and content of Pt in the films could be easily controlled by the amount Pt wire placed on the TiO2 target. Pt/Ti atomic ratio in the nanocomposite increased as the length of Pt wire on the TiO2 target increased. It was determined by XPS that the chemical states of Pt in as-deposited nanocomposites were Pt metal, Pt-O-Ti and PtO2, which were dependent on the Pt/Ti atomic ratio in the nanocomposite. The size of Pt nanoparticles in the composite films increased as the temperature of heat-treatment and Pt/Ti atomic ratio in the composite films increased. Pt nanoparticles in the nanocomposite films inhibited grain growth of TiO2 during heat-treatment.
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