Abstract
The Pb(Zr 0.5Ti 0.5)O 3 films of a few micron in thickness have been successfully deposited by sol–gel technique from nonhydrolyzed metal alkoxide precursor solutions. X-ray diffraction shows that the films exhibit a single perovskite phase with (1 0 0)-preferred orientation. SEM study indicates that PZT films possess a dense microstructure with no crack and void. A Pt/PZT/LaNiO 3 capacitor has been fabricated and showed excellent ferroelectricity, with a remnant polarization up to 53 μC/cm 2. The optical waveguide property has been examined by the prism-film coupling experiment. Multimodes are excited, indicating that the PZT thick films are potentially useful for optical waveguide devices.
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