Abstract
Thin films of YBa 2 Cu 3 O y are grown on (100) oriented MgO and SrTiO 3 substrates via planar dc-magnetron sputtering at high pressure. At optimized deposition parameters we obtained epitaxially grown, c-axes oriented films of high quality. Structure and orientation are determined by x-ray and channeling experiments, stoichiometry by RBS measurements. The surfaces of the films are very smooth. Force microscopy reveals a surface roughness less than 10 nm. The morphology of the surface is described by an arrangement of hillocks of an elliptic form, which might result from a growth mechanism on the base of screw dislocations. The films were structured by ion beam etching. Bridges with widths down to 1 μm were formed without detectable degradation of the superconducting properties.
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