Abstract
Diamond films were deposited by magnetron sputtering of vitreous carbon disc and also by plasma CVD technique using C2H2 + H2 or CO2 + H2 gas mixtures. The films were characterized by measuring the electrical, optical and microstructural properties. FTIR and Raman studies were carried out to study the effect ofsp 2 andsp 3 bonds present in the films. The films had a high mechanical stress which was determined from the broadening of the optical absorption tail in the films.
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