Abstract
Abrasive particles are the key elements of chemical-mechanical polishing (CMP) slurry. α-alumina abrasive, commonly used in CMP slurry, often causes scratches in the polished surface because of its agglomeration and high hardness. In this paper, a kind of novel α-alumina/ferric oxide core-shell type abrasive was prepared by coating a film of ferric oxide on the surface of α-Al2O3 particles with a chemical coprecipitation method. The α-alumina/ferric oxide composite particles were characterised by time-of-flight secondary ion mass spectroscopy (TOF-SIMS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and laser particle size analyser. The results show that Fe2O3 has been successfully coated on the surface of α-alumina particles and the dispersibility of the composite particles is better than that of pure α-Al2O3 particles.
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