Abstract
Abstract Based on the excellent physical and mechanical properties, high surface quality monocrystalline silicon has become a typical material for manufacturing Biological Micro Electro Mechanical Systems (Bio-MEMS). Abrasive flow machining (AFM) with the chemical mechanical effect is an effective polishing process to improve the surface quality of monocrystalline silicon and such hard and brittle materials. Thus, an aqueous viscoelastic polishing fluid with absorbent polymer and thickener compounded hydrogel as the carrier was developed and its microstructure and dynamic characteristics were analyzed. Then, polishing experiments were carried out and the surface of monocrystalline silicon with a roughness of 6.18nm was obtained.
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