Abstract
The pressure measurement within a closed vacuum chamber is a crucial indicator for evaluating vacuum performance. The commonly used puncture and sampling method is destructive to the device. This paper presents a new method based on laser-induced breakdown spectroscopy (LIBS) to evaluate the pressure inside a confined, transparent vacuum sandwich. The intensity of the emission spectra of copper sheets inside the sandwich was tested at different pressures, and three cylindrical cavities of different heights were subjected to experiments. The results show that the Cu and O intensity ratio varies linearly with gas pressure in the 1–103 Pa range, which can be used to predict the pressure inside the interlayer. It is fast, non-destructive, and remotely detectable. This work extends the application of LIBS for spatial confinement effects to enhance the spectral intensity and provides a new idea for pressure measurement in confined devices.
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