Abstract
The performance of micromachined sensors and actuators made of ferromagnetic material, such as nickel, is subject to environmental magnetic fields. To minimize such environmental interference, effective magnetic shielding is required. Preliminary magnetic field investigations are performed using finite element analysis (FEA). Effectiveness of the shielding versus the material properties of the shield, geometry of shield design, and orientation of the shield with respect to the magnetic field are analyzed. Experimental data are reported. The results agree well with the experimental data, except at higher magnetic flux density and a particular orientation. These analyses could be useful as a guide to improve magnetic shielding design and to enhance device performance.
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