Abstract
Component sputtering yield ratios, y m c y si c were measured by Auger electron spectroscopy for eight metal silicides CrSi 2, FeSi, Fe 3Si 7, MoSi 2, NbSi 2, TaSi 2, VSi 2 and WSi 2 bombarded by 1–4 keV Ar + ions. The experimental results were compared with those obtained by numerical calculations. The ratios of the component surface-binding energies, U M U Si , at which the calculated values Y M c Y Si c agree with the experimental ones were found and compared with available theoretical estimates. The accuracy of the analytical theory of the preferential sputtering is discussed.
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