Abstract
Five distinct effects have been identified which contribute to preferential recoil implantation in a polyatomic material. Their directions and relative magnitudes each depend on some combination of the following parameters: Masses and atomic numbers of the target atoms; mass and atomic number of the bombarding ion; ion-target and target-target interatomic potential; ion energy (indirectly). High ion energy favors a negative mass effect, i.e., light species are implanted preferentially. A positive mass effect is found at low ion energies, caused by differences in the angular scattering of light and heavy recoil atoms, respectively. The magnitude of this effect as well as the point of transition between positive and negative mass dependence are found to be governed primarily by the shape of the target-target interaction potential. The origin of conflicting conclusions in the theoretical literature on the sign of preferential recoil implantation is located. Estimates are given in the limit of small differences in atomic masses and charge numbers of the constituents of the target.
Published Version
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