Preface

Abstract

This book collects papers selected from the 25th Annual Conference & 14th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT2023).CSMNT2023 took place in the city of Shenzhen, China, from the 20th to the 23rd of October, 2023, which was hosted by Chinese Society of Micro-Nano Technology, and organized by Tsinghua Shenzhen International Graduate School, Peking University ShenZhen Graduate School, Harbin Institute of Technology and Shenzhen Society of Micro-Nano Technology.With the topic “Magical Micro-Nano • Wonderful World”, CSMNT2023 invited scientists in micro-nano technology all over the world to discuss the state-of –the-art and the development of the micro-nano technology. The conference set up a variety of activities such as general report, session report, poster exchanging and technical exhibition. CSMNT2023 focused on new technologies, new achievements, new breakthroughs and new trends in the fields of micro and nano technology and related frontiers. Topics include, but are not limited to: Design, simulation and analysis of micro/nano devices; Micro/nanomaterials; Fabrication technologies and processes; Micro/nano detection and characterization; Micro/nano sensors; Intelligent micro-systems and so on.There are 12 top level MEMS and NANO technology researchers were invited to make plenary presentations. Also 320 invited talks were given in 33 sessions. Thanks to all the staff and CSMNT Secretary for the efforts they have made, and thanks all honored participants. Their contributions in all aspects are indispensable to the conference’s success.Thanks to IOP Publishing for their work on publishing the special volume for the selected papers of the conference. We have good experience for cooperation, and hope that we can continue this cooperation in coming conferences in the future.The 26th Annual Conference of the Chinese Society of Micro/Nano Technology and 15th International Conference of the Chinese Society of Micro/Nano Technology (CSMNT2024) will be held in September 2024, Taiyuan, China.List of Conference organising committee is available in the pdf