Preface: phys. stat. sol. (c) 5/4

Abstract

AbstractThis special issue of physica status solidi contains the Proceedings of the 9th International Workshop on Plasma‐Based Ion Implantation and Deposition (PBII&D 2007). This workshop was held in Leipzig, Germany, 6–9 September 2007. The PBII&D workshop series started in 1993. Over the years, the number of participants in this workshop has grown, as well as the number of research topics presented. At the same time, the focus started to shift from fundamentals of plasma processes during plasma immersion ion implantation towards applications. Today, the workshop brings together scientists from all over the world who use plasma immersion ion implantation and deposition. The 9th International Workshop on Plasma‐Based Ion Implantation and Deposition had 91 attendees (9 of which were students) from 24 countries.The main topical areas of the workshop were simulation and modeling, plasma and ion sources, plasma diagnostics, ion–surface‐interaction, plasma based ion implantation, plasma based ion assisted deposition, surface modification and coatings, semiconductors, biomaterials, functional coatings, characterization of surface properties and industrial applications. During the workshop, 9 invited talks and 33 contributed talks were given in 9 oral sessions, and 32 posters were showcased. The scientific program was surrounded by social and cultural events, including a beer‐and‐barbecue get‐together prior to the conference, a visit of the UNESCO world‐culture‐heritage site Wörlitzer Park, and a conference banquet which was held in Püchau Castle.We would like to use this occasion to thank all our reviewers of the manuscripts for their hard work. Without them these proceedings could not have been realized. We would also like to thank our sponsors, which allowed us to support students and a few delegates from Eastern Europe and Asia. We also thank our industrial exhibitors for their interest and their valuable support.The next workshop in this series will be held in August 2009 at the National Institute of Space Research at São José dos Campos, Brazil. Mario Ueda and his coworkers look forward to seeing all of you for the 10th International Workshop on Plasma‐Based Ion Implantation and Deposition.Leipzig, February 2008