Abstract
AbstractThe shape of N(E) has been obtained from a carefully characterized electron spectrometer for 24 different elements and compounds. The secondary electron cascade has been found to obey a form N(E) = AE−m. A and m have been measured and used together with a model of the energy distribution of rediffused primary electrons to calculate an Auger backscattering factor for each material when the primary energy is 20 keV. These calculations have been compared with backscattering coefficients measured at the carbon 1s binding energy in the same instrument on the same samples. The results show the backscattering factor to be linear in atomic number. The measurement of A and m from a spectrum can be used to estimate the backscattering factor within an estimated error of about ±0.05.
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