Precursor decomposition mechanism of In2O3 powder for oxide ceramic targets

Abstract

In this study, precursor decomposition as well as nucleation and growth processes during the preparation of In2O3 powders via chemical precipitation were investigated. This is to provide guidance for the preparation of high-quality In-based oxide target powders. In-situ phase and microstructure evolution during thermal decomposition of precursors were analyzed. In addition, decomposition behavior of precursors at different heating rates was explored. Results show that amorphous In(OH)3 precursor powder gradually decomposes and transforms into crystalline In2O3 powder during heating process. Its degree of crystallinity increases with the increase in temperature. Fine and homogeneous In2O3 powder with average grain size of 54.46 nm was obtained by holding the powder at 770 °C for 3 h. The decomposition of precursors at any given heating rate can be divided into two stages: (i) dehydration and (ii) nucleation and crystallization. However, higher heating rate clearly results in temperature hysteresis effect, the occurrence of decomposition reaction at higher temperature, and an increase in the maximum reaction rate of decomposition reaction. Moreover, activation energy of thermal decomposition was obtained using model-free transformation method. Decomposition reaction model of In(OH)3 precursor was established using model-fitting method. It was deduced that first-stage reaction mechanism is three-dimensional diffusion. Reaction rate in this stage is controlled by product layer diffusion. Furthermore, second-stage reaction mechanism is random nucleation and subsequent growth. Reaction rate in this stage is controlled by nucleation and growth rates.