Abstract
In this study, we have proposed and implemented a profile measurement system for microholes using an optical fiber probe equipped with a vibrating mechanism driven by a piezoelectric element. The optical fiber probe consists of a stylus shaft of 3 μm diameter and a glass ball of 5 μm diameter attached to the tip. The principle involves the monitoring of the stylus shaft displacement by detecting a change in the amount of light received by two dual-element photodiodes. These diodes are set up facing laser beams that are irradiated onto the shaft portion from the X and Y directions. In this study, a tube-type piezoelectric element was set at the base of the stylus allowing it to vibrate in the X and Y directions. Firstly, we examined the displacement detection characteristics and frequency response characteristics of the probe. Secondly, the performance of the vibrating mechanism was examined. Finally, the measurement performance of the fiber probe was experimentally examined by measuring a hole of 150 μm diameter. The stylus could be operated in a circular path of 9.69 μm diameter. The changes in amplitude and phase of vibration of the stylus allowed for contact detection with the hole wall. Our study has potential applications for measurements of microholes in the diameter range of 10–150 μm.
Highlights
In recent years, the measurement of the profiles of microholes has become a subject of considerable interest with the increase in the levels of precision in microfabricationSensors and Materials, Vol 24, No 7 (2012)technologies
We propose a new optical fiber probe equipped with a vibrating mechanism driven by a piezoelectric element
We proposed and implemented a prototype for a measurement system that uses a vibrating optical fiber for accurately measuring a microhole
Summary
The measurement of the profiles of microholes has become a subject of considerable interest with the increase in the levels of precision in microfabrication. Technologies that can measure shapes with high aspect ratios (such as deep holes) are of particular importance These holes can include various nozzle holes such as fuel injection nozzles or synthetic nozzles, and deep microholes such as ferrules and microchannels that are used in optical communication devices or medical equipment. Various types of optical microscope have generally been used in the past to measure microholes These measurements are generally obtained from the top position; the measurements include only the inlet section of a hole or the shapes of the inlet and outlet sections. These microscopes cannot be used to evaluate the inside roundness, straightness, cylindricality, or surface roughness of a hole. The measurement performance of the fiber probe is experimentally examined by measuring a hole of 150 μm diameter
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