Precision positioning using MEMS based microactuator

Abstract

The critical factor for the hard disk manufacturers when designing the new generation of high capacity hard disks is `areal density'. Although linear density has increased dramatically increases in track density are limited by servo bandwidths, which are controlled by the actuator resonance. An approach, which is currently being investigated by the researchers, is the use of a second high bandwidth actuator at the end of the conventional voice-coil actuator. After theoretical analysis and discussions with industry electrostatic design in which the microactuator will sit on the slider between the suspension and the read/write head is selected. The design factors are: higher servo bandwidth, higher resonant frequency and low voltage supply. To microfabricate such microactuator we propose to use the latest technology called microelectromechanical systems technology. After schematic drawing layout design is made, it has been tested for electrical connections in the electrical layout model and the optimized design parameters are obtained. Finally it is shown that the design will satisfy the required specifications.