Abstract
Aiming at the problem that the probe station of the current wafer test system cannot be measured, a calibration device for the playing table of the wafer test system is designed. The device fully considers the structure of the probe station of the wafer test system and uses a laser interferometer to realize the calibration of the probe station of the wafer test system. Various error sources of the calibration device are analyzed, and errors are allocated according to the device’s technical indicators. The calculation results show that the maximum allowable error of the designed wafer test system probe station calibration device is 0.764μm, which is in line with the technical specifications.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
