Abstract
The fuzzy sliding-mode control strategy is used to tackle tracking problem of a piezo-actuated stage in this paper. The piezo-actuated system is composed of the piezoelectric actuator and a positioning mechanism. Due to hysteretic nonlinearity of the piezoelectric actuator, the tracking accuracy of the system is limited. To compensate for this nonlinearity, a feedback fuzzy sliding-mode control augmented with a predictor-based feedforward compensator is proposed. The controller, denoted as the feedforward-feedback fuzzy sliding-mode controller (FF-FSMC), can be applied to eliminate tracking error caused by the hysteretic characteristics. Experimental results on different types of reference inputs indicate that the proposed control schemes may suppress the tracking error of the piezo-actuated system effectively.
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