Abstract
This paper presents some of the recent research activities in the ongoing project for the development of high-tech component technologies for Microfactories at the Korea Institute of Machinery and Materials. Component technologies for Microfactory systems are key technologies for future development in this area, both in the R&D and industrial sectors, since many components are not currently available on the market. In this project, some key component technologies for Microfactory systems were chosen for development: multi-axis miniature air-bearing stages (including a planar motion stage), miniature high-speed spindles using air and magnetic bearings, shape memory alloy-based clamping devices for micro-tools and workpieces, optical multi-axis sensors for monitoring micro-tools and spindle rotation, and a numerical control system for the realization of flexible control algorithms. The design concepts and results for selected component technologies are briefly illustrated in this paper.
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