Abstract
We present a new two-step auto-alignment algorithm for the specimen stage of an ellipsometer. Correction of errors in tilt angle and position of the specimen stage can be performed by locating the reflected light spot at the center of the detector at two different angles of incidence or at two different orientations. The current method needs only one additional laser diode and one photo diode. Model simulation showed that the two-step algorithm works well. This method is very simple and easy and has low cost.
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