Precision alignment of pulse stage using moire signals

Jing-Nan Liu Jing-Nan Liu,H Uchida,A Kono,V.T Chitnis,Lizhong Zhou Lizhong Zhou,R Sharma,H Furuhashi,Y Uchida

doi:10.1109/sice.2002.1195427

Precision alignment of pulse stage using moire signals

Jing-Nan Liu Jing-Nan Liu, H Uchida + Show 6 more

https://doi.org/10.1109/sice.2002.1195427

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Publication Date: Aug 5, 2002

Citations: 2

Affiliation: Southeast University, Nagoya Institute of Technology, Nagoya University, CSIR National Physical Laboratory of India, Aichi Institute of Technology

#Moire Signals #Simple Optical Alignment + Show 8 more

Abstract
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Abstract

A simple and high accuracy optical intelligent alignment system using a position sensor of a diffraction grating is proposed. From a simulation of this system using a permeation type diffraction grating, we can conclude that it is possible to improve the wide position definition from /spl plusmn/0.25mm to /spl plusmn/12/spl mu/m with precision accuracy of /spl plusmn/4nm.

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