Abstract
This paper presents a femtosecond laser processing method to precisely control taper angles of micro-holes. For the formation of micro-holes in samples through material removal with a laser, the ablation depth should be determined. The ablation depth depends on the ablation rate, number of repetitions for scanning, beam size, and spot overlap ratio. In particular, these processing parameters influence taper angles. We developed a multilevel material processing method involving analytical models to ablate samples and achieve desired taper angles. High precision micro-holes with accurately controlled taper angles and hole size were formed on 64FeNi alloy (Invar) sheets by using a simple optical system comprising a galvanometer scanner and a focusing lens.
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