Precise preparation of quartz pendulous reed by using picosecond laser modification assisted wet etching

Abstract

The Quartz pendulous reed is the core part of the quartz flexible accelerometer. The current quartz pendulous reed forming technology has shortcomings, such as poor processing quality and high production cost. In this paper, picosecond laser modification assisted wet etching technology is proposed to prepare quartz pendulous reed. The modification mechanism of fused silica induced by picosecond laser was investigated. Different from the network structure changes caused by femtosecond laser, mechanical damage is the main form of picosecond laser modification. The mapping among etching time, etching temperature and HF solution concentration were studied by using the control variable method. The proposed picosecond laser assisted wet etching technology has the advantages of high dimensional accuracy, good edge quality, low residual stress, and high efficiency.