Abstract
We demonstrate the non-destructive measurement of the stiffness of single-beam, monocrystalline silicon cantilevers with a trapezoidal cross-section and tips as used for atomic force microscopy from the knowledge of cantilever dimensions, eigenfrequencies and material parameters. This yields stiffness values with an uncertainty of ±25% as the result critically depends on the thickness of the cantilever that is experimentally difficult to determine. The uncertainty is reduced to ±7% when the measured fundamental eigenfrequency is included in the calculation and a tip mass correction is applied. The tip mass correction can be determined from the eigenfrequencies of the fundamental and first harmonic modes. Results are verified by tip destructive measurements of the stiffness with a precision instrument recording a force–bending curve yielding an uncertainty better than ±5%.
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