Abstract

Ca-P-O films were prepared by laser CVD using Ca(dpm)2 and (C6H5O)3PO metal organic precursors. The crystal phase of Ca-P-O films changed depending on deposition temperature (Tdep), total pressure (Ptot), laser power (PL) and molar ratio of Ca to P (RCa/P). β-TCP films in a single phase were obtained in a P-rich and high Tdep region, while HAp films in a single phase were obtained in a Ca-rich and low Tdep region. The β-TCP films had a (220) orientation with an elongated and angular roof-shaped surface texture, whereas HAp films had a (300) orientation with a granular surface texture. Both the β-TCP film and the HAp film had a dense cross section. The Ca-P-O films were immersed in a Hanks’ solution for 6 h to 7 d. Particle-shaped precipitates were observed on the β-TCP and HAp films after 3 d immersion. Needle-shaped precipitates covered the whole surface of HAp film after 7 d immersion.

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