Abstract
Within the last eighteen months, great interest has developed in certain ceramic materials which superconduct above liquid nitrogen temperatures. Recently it has been shown that these materials can be deposited as thin films on various substrates without significant change in critical temperature. Cross-sectional TEM studies have provided key information regarding the structure of these films and their interaction with the various substrates. However, specimen preparation for such studies can be difficult, and only a few successful results have been reported. This paper describes a successful method adapted from routine semiconductor cross section technique.The following technique has been applied to specimens of superconducting ceramic films (Y-Ba-Cu-O) deposited by pulsed excimer laser or electron beam co-evaporation on sapphire and strontium titanate substrates.Wafers bearing the films must have their major crystallographic axes identified and marked on the back surface. The wafer is cemented face down to a microscope slide with Crystalbond.
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