Abstract
We study the scaling behavior of the step width w while the crystal is growing from vapor via the step-flow mechanism. The growth exponent β ≡ d ln w d ln t varies in several stages when the microscopic mechanism of step fluctuation changes. Eventually, after the density of kinks becomes sufficiently high so that the step can be regarded as rough, the exponent β takes the value ∼ 1 4 or ∼ 1 3 depending on the impingement flux f, as is predicted by the theory.
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