Abstract
The balance of power in a radio-frequency ion source is constructed by calculating the inevitable power loss at surfaces bordering the inductive discharge plasma and power loss to the generation and preliminary acceleration of working-gas ions. The relationship between the specific radio-frequency power consumption per ion-current unit emerging from the source and electron temperature and geometric parameters of the gas discharge chamber is determined.
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Schedule a callMore From: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
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