Abstract
In convergent beam electron diffraction (CBED) on two-dimensional (2D) materials, the intensity distributions within the individual CBED spots map the local atomic arrangements within the probed region. In this study we demonstrate that the average intensities within the CBED spots essentially depend on the scattering parameters by a single atom, thus, offering the possibility of the direct measurement of such parameters. Scattering potential of an individual atom can be approximated by the Gaussian function and its parameters, the standard deviation and the maximal phase shift, can be recovered from the ratio of the intensities in the zero- and higher orders spots in CBED pattern. In order to demonstrate this, we simulated CBED patterns and extracted the atomic scattering parameters from such patterns. In the simulated examples, no weak phase object approximation is applied and the proposed method provides accurate results even for materials with large phase shifts up to 1.5 rad, as for example tungsten. The scattering parameters recovered from the experimental CBED patterns of graphene and twisted graphene-hBN structure show good agreement with the theoretically obtained values.
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