Abstract

The potential of low temperature cofired ceramic (LTCC) multilayer technology allows realization of different structures for sensor applications. Examples of sensors realised at the Department of Hybrid Microelectronics in the Faculty of Electrical Engineering and Informatics at the Technical University in Kosice have shown the potential and development possibilities of LTCC for a wide field of thick film sensor applications. Other sensor applications were realized on a special shaped body based on LTCC multilayers.

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