Abstract
Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the ID/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.
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