Postfitting Control Scheme for Periodic Piezoscanner Driving

Abstract

The hysteresis and other nonlinear properties of piezoelectric scanners cause image distortion in scanning probe microscopy (SPM). Two types of control algorithm, feedback and feedforward, were applied to solve this problem. In general, a feedforward control method has a higher scanning speed, a higher resolution, but a lower accuracy than a feedback control method. In this paper, we propose a postfitting control scheme for driving the x-scanner of SPM periodically. This method possesses the advantages of both the feedback and feedforward methods, and achieves a higher image resolution and a higher accuracy than a pure feedback or feedforward method, without sacrificing scanning speed.