Abstract
In this study, a new room temperature type gas sensor device based on plasma deposition of tetramethyltin (TMT) and O2 organically hybridized film followed by post treatment on the deposited film was developed for improving CO gas sensitivity and distinguishing from methane, butane, and carbon monoxide gases in the test environment. Plasma deposited SnOx thin film was first produced from TMT and O2 gas mixtures at room temperature, and then post treatments on the SnOx thin films were carried out by either spin coating with poly ethylene glycol (PEG) or surface grafting with p-styrenesulfonic acid sodium salt (Nass). It was found that the gas sensor spin coating post treated with PEG exhibits linear response to CO gas with the sensitivity not affected by methane and butane gases. For CO concentrations ranging from 30 to 650 ppm, steep change in the sensor resistance can be detected without warming up the sensor.
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