Possibility to detect Raman spectrum using atomic force cantilevered SNOM with aperture-less pyramidal probe

Abstract

We have studied a possibility to detect silicon Raman spectrum from localized strain sample using an illumination-correction mode near-field optical Raman spectroscopy with aperture-less pyramidal probe for analysis of strain distribution in high speed device. In order to study near-field optical Raman spectroscopy, we have proposed new type of atomic force cantilevered SNOM with aperture-less pyramidal probe, which has mainly 3 functions to obtain both atomic force microscope (AFM), scanning near-field microscope (SNOM) and Raman spectroscopy. We considered whether the aperture-less cantilevered probe has near-field optical images by calculating laser light propagation through the aperture-less pyramidal probe covered with some metal films using a finite definition time domain (FDTD) method. We have also prototyped the combination system with atomic force cantilevered SNOM and Raman spectroscope. We demonstrated high resolution SNOM image and the possibility to detect Raman spectrum of the Si surface using the combination system with the aperture-less pyramidal probe.