Possibility of high-resolution ptychographic iterative imaging with low energy electrons: dynamical calculations

Abstract

Ptychographic iterative engine (PIE), a form of coherent diffractive imaging in which the phase of both low-angle and high-angle diffraction data is used to form an image without a lens, can in principle deliver wavelength-limited resolution. Working at low accelerating voltages (30 keV) reduces specimen knock-on damage, increases high-resolution contrast and allows a scanning electron microscope to be used as a transmission electron microscopy. However, electrons are very strongly scattered at low energy. To that end, the effect of dynamical scattering on PIE at low accelerating voltages is calculated to illustrate the possibility of generating high-resolution images with low energy electrons.